• DocumentCode
    460315
  • Title

    Atom Force Microscopy of SnO2 Nano Layers

  • Author

    Filevskaya, L.N. ; Smyntyna, V.A. ; Grinevich, V.S.

  • Author_Institution
    Odessa Nat. I.I. Mcchnikov Univ.
  • Volume
    1
  • fYear
    2006
  • fDate
    27-29 Sept. 2006
  • Firstpage
    63
  • Lastpage
    66
  • Abstract
    The gas sensitivity applied problems solutions need a consideration and detailed investigation of the material´s electronic and ionic-subsystems ´ behavior. These systems´ behavior at their own turn is tightly connected with the structure and morphology of surfaces. The morphology investigations results are given for the SnO2layers obtained with the polymers usage
  • Keywords
    atomic force microscopy; nanostructured materials; tin compounds; SnO2; atomic force microscopy; nanostructured materials; Annealing; Atomic force microscopy; Atomic layer deposition; Nanostructured materials; Optical devices; Optical sensors; Polymer films; Substrates; Surface morphology; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    International Semiconductor Conference, 2006
  • Conference_Location
    Sinaia
  • Print_ISBN
    1-4244-0109-7
  • Type

    conf

  • DOI
    10.1109/SMICND.2006.283932
  • Filename
    4063159