DocumentCode
460315
Title
Atom Force Microscopy of SnO2 Nano Layers
Author
Filevskaya, L.N. ; Smyntyna, V.A. ; Grinevich, V.S.
Author_Institution
Odessa Nat. I.I. Mcchnikov Univ.
Volume
1
fYear
2006
fDate
27-29 Sept. 2006
Firstpage
63
Lastpage
66
Abstract
The gas sensitivity applied problems solutions need a consideration and detailed investigation of the material´s electronic and ionic-subsystems ´ behavior. These systems´ behavior at their own turn is tightly connected with the structure and morphology of surfaces. The morphology investigations results are given for the SnO2layers obtained with the polymers usage
Keywords
atomic force microscopy; nanostructured materials; tin compounds; SnO2; atomic force microscopy; nanostructured materials; Annealing; Atomic force microscopy; Atomic layer deposition; Nanostructured materials; Optical devices; Optical sensors; Polymer films; Substrates; Surface morphology; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
International Semiconductor Conference, 2006
Conference_Location
Sinaia
Print_ISBN
1-4244-0109-7
Type
conf
DOI
10.1109/SMICND.2006.283932
Filename
4063159
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