Compact Lumped Elements Micromachined Band-Pass Filters with Discrete Switching for 1.8/5.2 GHZ Applications

Author

Neculoiu, D. ; Giacomozzi, F. ; Bary, L. ; Vasilache, D. ; Muller, A.A. ; Margesin, B. ; Petrini, I. ; Buiculescu, C. ; Takacs, A. ; Plana, R. ; Muller, A.

Author_Institution

IMT-Bucharest, Bucharest

Volume

1

fYear

2006

fDate

27-29 Sept. 2006

Firstpage

107

Lastpage

110

Abstract

This paper presents the design, fabrication and first experimental results of a dual-band switchable band-pass filter structure for the selection of DCS 1800 and WLAN standards. The design approach makes use of intensive electromagnetic modelling and layout optimisation. The fabrication technology is based on bulk and surface silicon micromachining to manufacture lumped elements on high resistivity silicon bulk and dielectric membrane. Filter test structures were fabricated and their frequency responses are presented

Keywords

UHF filters; band-pass filters; micromachining; microswitches; microwave filters; optimisation; radiofrequency integrated circuits; wireless LAN; 1.8 GHz; 5.2 GHz; DCS 1800; UHF filter; WLAN standards; band-pass filter structure; compact lumped elements; dielectric membrane; discrete switching; dual-band filter structure; electromagnetic modelling; layout optimisation; micromachined band-pass filters; microwave filter; surface silicon micromachining; switchable filter structure; Band pass filters; Design optimization; Distributed control; Dual band; Electromagnetic modeling; Fabrication; Manufacturing; Micromachining; Silicon; Wireless LAN; dual-band; electromagnetic modelling; membrane-supported;

fLanguage

English

Publisher

ieee

Conference_Titel

International Semiconductor Conference, 2006

Conference_Location

Sinaia

Print_ISBN

1-4244-0109-7

Type

conf

DOI

10.1109/SMICND.2006.283943

Filename

4063170