Title :
Compact Lumped Elements Micromachined Band-Pass Filters with Discrete Switching for 1.8/5.2 GHZ Applications
Author :
Neculoiu, D. ; Giacomozzi, F. ; Bary, L. ; Vasilache, D. ; Muller, A.A. ; Margesin, B. ; Petrini, I. ; Buiculescu, C. ; Takacs, A. ; Plana, R. ; Muller, A.
Author_Institution :
IMT-Bucharest, Bucharest
Abstract :
This paper presents the design, fabrication and first experimental results of a dual-band switchable band-pass filter structure for the selection of DCS 1800 and WLAN standards. The design approach makes use of intensive electromagnetic modelling and layout optimisation. The fabrication technology is based on bulk and surface silicon micromachining to manufacture lumped elements on high resistivity silicon bulk and dielectric membrane. Filter test structures were fabricated and their frequency responses are presented
Keywords :
UHF filters; band-pass filters; micromachining; microswitches; microwave filters; optimisation; radiofrequency integrated circuits; wireless LAN; 1.8 GHz; 5.2 GHz; DCS 1800; UHF filter; WLAN standards; band-pass filter structure; compact lumped elements; dielectric membrane; discrete switching; dual-band filter structure; electromagnetic modelling; layout optimisation; micromachined band-pass filters; microwave filter; surface silicon micromachining; switchable filter structure; Band pass filters; Design optimization; Distributed control; Dual band; Electromagnetic modeling; Fabrication; Manufacturing; Micromachining; Silicon; Wireless LAN; dual-band; electromagnetic modelling; membrane-supported;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.283943
