Title :
Tunable MEMS Filters for Millimeter Wave Applications
Author :
Takacs, A. ; Neculoiu, D. ; Vasilache, D. ; Muller, A. ; Pons, P. ; Aubert, H. ; Plana, R.
Author_Institution :
IMT Bucharest
Abstract :
This paper addresses the design and the realization of millimeter wave tunable filters using MEMS (micro-electro-mechanical-systems) technology. In order to design hands top tunable MEMS filters two new topologies are presented. The tunable behavior is achieved using MEMS switches. These switches, based on original topology of two cantilever shunt switch, have a typical shunt switch behavior and low actuation voltage. The overall structures are manufactured using dielectric membrane
Keywords :
band-stop filters; membranes; micromechanical devices; microswitches; millimetre wave filters; MEMS switches; bandstop filter; cantilever shunt switch; dielectric membrane; microelectro-mechanical-systems; millimeter wave filters; tunable MEMS filters; Biomembranes; Dielectrics; Filters; Low voltage; Manufacturing; Micromechanical devices; Microswitches; Millimeter wave technology; Switches; Topology; MEMS; bandstop filter; dielectric membrane; tunable filter;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.283945
