Normally-Closed Electrostatic Microvalve Fabricated Using Exclusively Soft-Lithographic Techniques and Operated With Portable Electronics

Author

Tice, Joshua D. ; Rosheck, John B. ; Hamlin, Christopher D. ; Apblett, Christopher A. ; Kenis, P.J.A.

Author_Institution

Sch. of Chem. Sci., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA

Volume

22

Issue

6

fYear

2013

fDate

Dec. 2013

Firstpage

1251

Lastpage

1253

Abstract

We report an elastomer-based electrostatic microvalve that was fabricated using replica molding, micro-transfer printing, and plasma bonding. The microvalve can be actuated with an electric potential of ~ 220 V and can withstand pressures up to 3 kPa. Sixteen independently-operated valves were integrated on a single chip and operated with portable electronics.

Keywords

elastomers; electric potential; electrostatic devices; microvalves; moulding; replica techniques; soft lithography; elastomer-based electrostatic microvalve; electric potential; independently-operated valves; microtransfer printing; normally-closed electrostatic microvalve fabrication; plasma bonding; portable electronics; replica molding; soft-lithographic techniques; Actuators; Electric potential; Electrodes; Electrostatics; Microvalves; Strain; Carbon nanotubes; electrostatic microvalve; poly (dimethylsiloxane); soft-lithography;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2013.2282711

Filename

6626660