Title :
Design and Development of AC-coupled Single-sided Silicon Strip Sensor
Author :
Kah, D.H. ; Bae, J.B. ; Hyun, H.J. ; Kang, H.D. ; Kim, H.J. ; Park, H. ; Park, J.M. ; Park, K.S.
Author_Institution :
Basic Atomic Energy Res. Inst., Kyungpook Nat. Univ., Daegu
fDate :
Oct. 29 2006-Nov. 1 2006
Abstract :
Semiconductor detectors, and in particular silicon detectors, have unique properties that make them very suitable for the detection of ionizing radiation. We reported the design and development processes of the DC-type double-sided silicon strip sensor in the 2005 Nuclear Science Symposium. In this meeting we present the design and development of the single-sided silicon strip sensor which has coupling capacitors and bias resistors. The silicon sensor concept, details of the sensor design and fabrication processes are presented and the measurement results of the electrical characteristics of the fabricated sensors are also reported.
Keywords :
position sensitive particle detectors; silicon radiation detectors; AC-coupled single-sided silicon strip sensor; Si; bias resistors; coupling capacitors; fabrication processes; ionizing radiation detection; semiconductor detectors; sensor design; silicon detectors; Capacitive sensors; Ionizing radiation; Ionizing radiation sensors; Nuclear and plasma sciences; Process design; Radiation detectors; Semiconductor radiation detectors; Sensor phenomena and characterization; Silicon radiation detectors; Strips;
Conference_Titel :
Nuclear Science Symposium Conference Record, 2006. IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-0560-2
Electronic_ISBN :
1095-7863
DOI :
10.1109/NSSMIC.2006.356195