A Simulation Study of Silicon Avalanche Photodiodes

Author

Jung, S. ; Moon, M. ; Kim, H.J. ; Park, H. ; Ryu, S.

Author_Institution

Dept. of Phys., Kyungpook Nat. Univ., Daegu

Volume

2

fYear

2006

fDate

Oct. 29 2006-Nov. 1 2006

Firstpage

1064

Lastpage

1067

Abstract

In this paper we report simulation results of photon entrance window and AR (antireflection) coating. Also a simulation result of reverse type APD is presented for the detection of visible light from scintillator crystals by using the process simulation tool Athena and device simulation tool Atlas from Silvaco International. The fabrication method used in the process simulation of the device is conventional ion implantation and diffusion method.

Keywords

antireflection coatings; avalanche photodiodes; elemental semiconductors; scintillation counters; semiconductor device manufacture; semiconductor diodes; Athena; Atlas; Silvaco International; antireflection coating; device simulation tool; ion diffusion method; ion implantation method; photon entrance window; process simulation tool; reverse type APD; scintillator crystals; silicon avalanche photodiodes; visible light detection; Avalanche photodiodes; Coatings; Dark current; Infrared detectors; Manufacturing processes; Medical simulation; Optical reflection; Silicon; X-ray detection; X-ray detectors;

fLanguage

English

Publisher

ieee

Conference_Titel

Nuclear Science Symposium Conference Record, 2006. IEEE

Conference_Location

San Diego, CA

ISSN

1095-7863

Print_ISBN

1-4244-0560-2

Electronic_ISBN

1095-7863

Type

conf

DOI

10.1109/NSSMIC.2006.356030

Filename

4179184