• DocumentCode
    462497
  • Title

    Double Sided 3D Detector Technologies at CNM-IMB

  • Author

    Pellegrini, G. ; Campabadal, F. ; Lozano, M. ; Rafi, J.M. ; Ullan, M. ; Bates, R. ; Fleta, C. ; Pennicard, D.

  • Author_Institution
    Centro Nacional de Microelectron., CNM-IMB, Barcelona
  • Volume
    2
  • fYear
    2006
  • fDate
    Oct. 29 2006-Nov. 1 2006
  • Firstpage
    1248
  • Lastpage
    1252
  • Abstract
    A new architecture for 3D silicon radiation detectors is proposed which simplifies the fabrication process and avoids the limitations of 3D detectors technology. The detector consists in a three-dimensional array of electrodes that penetrate into the detector bulk. The geometry of the detector is such that a central anode is surrounded by four cathode contacts. This geometry gives a uniform electric field with the maximum drift and depletion distance set by the electrode spacing rather than detector thickness. This structure is similar to a conventional 3D detector, but has a simpler fabrication process. The technological and the electrical simulations together with the fabrication steps of this new detector configuration are reported in this paper.
  • Keywords
    silicon radiation detectors; 3D silicon radiation detectors; Si; double sided 3D detector technology; Electrodes; Fabrication; Geometry; Large Hadron Collider; Nuclear and plasma sciences; Radiation detectors; Sensor arrays; Silicon radiation detectors; X-ray detection; X-ray detectors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nuclear Science Symposium Conference Record, 2006. IEEE
  • Conference_Location
    San Diego, CA
  • ISSN
    1095-7863
  • Print_ISBN
    1-4244-0560-2
  • Electronic_ISBN
    1095-7863
  • Type

    conf

  • DOI
    10.1109/NSSMIC.2006.356070
  • Filename
    4179224