Title :
Double Sided 3D Detector Technologies at CNM-IMB
Author :
Pellegrini, G. ; Campabadal, F. ; Lozano, M. ; Rafi, J.M. ; Ullan, M. ; Bates, R. ; Fleta, C. ; Pennicard, D.
Author_Institution :
Centro Nacional de Microelectron., CNM-IMB, Barcelona
fDate :
Oct. 29 2006-Nov. 1 2006
Abstract :
A new architecture for 3D silicon radiation detectors is proposed which simplifies the fabrication process and avoids the limitations of 3D detectors technology. The detector consists in a three-dimensional array of electrodes that penetrate into the detector bulk. The geometry of the detector is such that a central anode is surrounded by four cathode contacts. This geometry gives a uniform electric field with the maximum drift and depletion distance set by the electrode spacing rather than detector thickness. This structure is similar to a conventional 3D detector, but has a simpler fabrication process. The technological and the electrical simulations together with the fabrication steps of this new detector configuration are reported in this paper.
Keywords :
silicon radiation detectors; 3D silicon radiation detectors; Si; double sided 3D detector technology; Electrodes; Fabrication; Geometry; Large Hadron Collider; Nuclear and plasma sciences; Radiation detectors; Sensor arrays; Silicon radiation detectors; X-ray detection; X-ray detectors;
Conference_Titel :
Nuclear Science Symposium Conference Record, 2006. IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-0560-2
Electronic_ISBN :
1095-7863
DOI :
10.1109/NSSMIC.2006.356070