Energy Input Regimes in the EUV Radiation Source Based on the Pseudospark Discharge

Author

Korolev, Yu.D. ; Frants, O.B. ; Geyman, V.G. ; Ivashov, R.V. ; Landl, V.N. ; Shemyakin, I.A.

Author_Institution

Inst. of High Current Electron., Tomsk

Volume

1

fYear

2006

fDate

25-29 Sept. 2006

Firstpage

83

Lastpage

86

Abstract

In this paper the regimes of energy input to pseudospark discharge plasma in various stages of its development and EUV radiation behavior are investigated. The data for different temporal discharge stages are presented. It was shown, that the main fraction of EUV radiation energy is generated in the superdense glow discharge phase and depend on the value of energy input in this stage. Influence of electric circuit parameters and hollow cathode configuration on conversion efficiency has been investigated. The ways of conversion efficiency value enhancing have been analyzed

Keywords

glow discharges; sparks; EUV radiation source; conversion efficiency; electric circuit parameters; energy input; hollow cathode configuration; pseudospark discharge; superdense glow discharge phase; Anodes; Capacitors; Cathodes; Circuits; Electrodes; Elementary particle vacuum; Fault location; Plasma measurements; Ultraviolet sources; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Discharges and Electrical Insulation in Vacuum, 2006. ISDEIV '06. International Symposium on

Conference_Location

Matsue

ISSN

1093-2941

Print_ISBN

1-4244-0191-7

Electronic_ISBN

1093-2941

Type

conf

DOI

10.1109/DEIV.2006.357237

Filename

4194817