Title :
Influence of Mechanical Finishing on Secondary Electron Emission of Alumina Ceramics
Author :
Suharyanto ; Michizono, S. ; Saito, Y. ; Tumiran ; Yamano, Y. ; Kobayashi, S.
Author_Institution :
Dept. of Electr. & Electron. Syst., Saitama Univ.
Abstract :
Secondary electron emission (SEE) coefficients of alumina ceramics with three different surface finishes have been measured using a scanning electron microscope with a single-pulse electron beam (100 pA, 1 ms). SEE coefficients of those aluminas with annealing process became lower after mechanical grinding operations even though its average roughness was almost same as those of as-sintered ones. SEE coefficients of mirror-finished samples were the smallest among the samples. Changes of SEE coefficient with incident angle of primary electrons for smooth and rough surfaces are also discussed
Keywords :
alumina; ceramics; scanning electron microscopes; secondary electron emission; surface finishing; alumina ceramics; mechanical finishing; scanning electron microscope; secondary electron emission; single-pulse electron beam; Acceleration; Ceramics; Dielectrics and electrical insulation; Electron beams; Electron emission; Finishing; Klystrons; Rough surfaces; Surface roughness; Surface topography;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 2006. ISDEIV '06. International Symposium on
Conference_Location :
Matsue
Print_ISBN :
1-4244-0191-7
Electronic_ISBN :
1093-2941
DOI :
10.1109/DEIV.2006.357240