Mixing in a 220MHz CMOS-MEMS

Author

López, J.L. ; Teva, J. ; Uranga, A. ; Torres, F. ; Verd, J. ; Abadal, G. ; Barniol, N. ; Esteve, J. ; Perez-Murano, F.

Author_Institution

Departament d´´Enginyeria Electronica, Univ. Autonoma de Barcelona, Bellaterra

fYear

2007

fDate

27-30 May 2007

Firstpage

2630

Lastpage

2633

Abstract

This paper describes the frequency mixing operation of a micro electro mechanical system device designed and fabricated in a CMOS commercial technology (AMS 0.35mum). The theory of the MEMS is summarized and a CMOS fully integrated MEMS is characterized as a mixer. The designed MEMS is a polysilicon clamped-clamped beam that presents a resonance frequency in the VHF range. CMOS-MEMS based mixer limitations are treated and a technique based on differential amplification to improve performance is given.

Keywords

CMOS integrated circuits; amplification; micromechanical devices; mixers (circuits); 0.35 micron; CMOS commercial technology; CMOS-MEMS based mixer; CMOS-MEMS device; differential amplification; frequency mixing operation; microelectro mechanical system device; polysilicon clamped-clamped beam; Bridge circuits; CMOS technology; Capacitors; Chromium; Filters; Micromechanical devices; Radio frequency; Resonance; Resonant frequency; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on

Conference_Location

New Orleans, LA

Print_ISBN

1-4244-0920-9

Electronic_ISBN

1-4244-0921-7

Type

conf

DOI

10.1109/ISCAS.2007.377953

Filename

4253217