• DocumentCode
    465112
  • Title

    CMOS Cantilever-based Oscillator for Attogram Mass Sensing

  • Author

    Verd, J. ; Uranga, A. ; Teva, J. ; Abadal, G. ; Torres, F. ; Barniol, N. ; Perez-Murano, F. ; Esteve, J.

  • Author_Institution
    Dept. d´´Enginyeria Electronica, Univ. Autonoma de Barcelona
  • fYear
    2007
  • fDate
    27-30 May 2007
  • Firstpage
    3319
  • Lastpage
    3322
  • Abstract
    In this paper, we present the design, fabrication and characterization of a self-excited sub-micro meter scale resonant cantilever based on a modified Pierce oscillator topology monolithically integrated in a 0.35-mum CMOS chip. The oscillator has a frequency of around 6MHz and can be used for mass sensing in the attogram range.
  • Keywords
    CMOS integrated circuits; cantilevers; mass measurement; nonelectric sensing devices; oscillators; 0.35 micron; CMOS cantilever-based oscillator; attogram mass sensing; modified Pierce oscillator; self-excited resonant cantilever; CMOS process; Chemical and biological sensors; Circuit topology; Fabrication; Nanoelectromechanical systems; Oscillators; Phase locked loops; RLC circuits; Resonance; Resonant frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on
  • Conference_Location
    New Orleans, LA
  • Print_ISBN
    1-4244-0920-9
  • Electronic_ISBN
    1-4244-0921-7
  • Type

    conf

  • DOI
    10.1109/ISCAS.2007.378221
  • Filename
    4253389
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=465112