Title :
CMOS Cantilever-based Oscillator for Attogram Mass Sensing
Author :
Verd, J. ; Uranga, A. ; Teva, J. ; Abadal, G. ; Torres, F. ; Barniol, N. ; Perez-Murano, F. ; Esteve, J.
Author_Institution :
Dept. d´´Enginyeria Electronica, Univ. Autonoma de Barcelona
Abstract :
In this paper, we present the design, fabrication and characterization of a self-excited sub-micro meter scale resonant cantilever based on a modified Pierce oscillator topology monolithically integrated in a 0.35-mum CMOS chip. The oscillator has a frequency of around 6MHz and can be used for mass sensing in the attogram range.
Keywords :
CMOS integrated circuits; cantilevers; mass measurement; nonelectric sensing devices; oscillators; 0.35 micron; CMOS cantilever-based oscillator; attogram mass sensing; modified Pierce oscillator; self-excited resonant cantilever; CMOS process; Chemical and biological sensors; Circuit topology; Fabrication; Nanoelectromechanical systems; Oscillators; Phase locked loops; RLC circuits; Resonance; Resonant frequency;
Conference_Titel :
Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on
Conference_Location :
New Orleans, LA
Print_ISBN :
1-4244-0920-9
Electronic_ISBN :
1-4244-0921-7
DOI :
10.1109/ISCAS.2007.378221
