Dependence of GMR in Co/Cu Multilayers on Sputtering Conditions

Author

Chen, Ci ; Sakashita, Y. ; Suzuki, Yuya ; Kato, Toshihiko ; Iwata, Satoru ; Tsunashima, Shigeru ; Sasaki, Kazuhiko ; Sugai, H.

Author_Institution

Nagoya Univ., Nagoya

fYear

2006

fDate

8-12 May 2006

Firstpage

825

Lastpage

825

Abstract

Magnetic properties of magnetic multilayers, such as Co/Cu and Tb/Co, deeply depend on sputtering conditions (S.S.P. Parkin et al., 1991),(S. Schumeusser et al., 1997). However, it is not clear that the relationship between plasma parameter of sputtering discharge, and interface structure and magnetic properties of the multilayers. In particular, the magnetoresistance (MR) ratio for Co/Cu multilayers is very sensitive to the interface structure. Therefore, MR effect in Co/Cu may be good measure for evaluating the interface structure of multilayers. In this report, dependence of magnetoresistance properties in Co/Cu multilayers on sputtering conditions was investigated by measuring energy and space distributions of Ar+ ions and metal atoms.

Keywords

cobalt; copper; ferromagnetic materials; giant magnetoresistance; magnetic multilayers; sputter deposition; Co-Cu; Tb-Co; giant magnetoresistance; interface structure; magnetic multilayers; magnetic properties; mgnetic properties; plasma parameter; sputtering discharge; Atomic measurements; Energy measurement; Extraterrestrial measurements; Giant magnetoresistance; Magnetic multilayers; Magnetic properties; Nonhomogeneous media; Plasma measurements; Plasma properties; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2006. INTERMAG 2006. IEEE International

Conference_Location

San Diego, CA

Print_ISBN

1-4244-1479-2

Type

conf

DOI

10.1109/INTMAG.2006.374856

Filename

4262258