Title :
The Analysis of the Appropriateness of the Microelectromechanical Systems Sensor Devices (MEMS) Construction on the base of the Active Semiconductor Elements
Author :
Matviykiv, Mykhaylo ; Lobur, Mykhaylo ; Teslyuk, Vasyl ; Matviykiv, Taras
Author_Institution :
Dept. of Autom. Design Syst. & Electron. Means for inf. & Comput. Technol., Nat. Univ. "Lvivska Politekhnika", Lviv
fDate :
Feb. 28 2006-March 4 2006
Abstract :
The appropriateness of the microelectromechanical systems sensor devices (MEMS) construction on the base of the active semiconductor elements -diodes is analyzed.
Keywords :
microsensors; semiconductor diodes; active semiconductor elements; microelectromechanical systems sensor devices; semiconductor diodes; Capacitive sensors; Current density; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Photonic band gap; Schottky diodes; Semiconductor diodes; Sensor systems; Silicon; MEMS; sensors;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications, and Computer Science, 2006. TCSET 2006. International Conference
Conference_Location :
Lviv-Slavsko
Print_ISBN :
966-553-507-2
DOI :
10.1109/TCSET.2006.4404676
