Title :
Method of Manufacturing Precision Diaphragmes Wave-Guide of HF-Devices of a Millimeter-Wave
Author :
Dorosh, Natalya ; Kuchmiy, Galyna ; Smerklo, Lyubomyr
Author_Institution :
Lviv Polytech Nat. Univ., Lviv
fDate :
Feb. 28 2006-March 4 2006
Abstract :
In activity a reduced method of manufacturing of precision diaphragmes, which one can be utilised for manufacturing of microelectronic HF -devices.
Keywords :
millimetre wave devices; semiconductor device manufacture; microelectronic HF -devices; millimeter-wave; precision diaphragmes wave-guide manufacturing; Etching; Filters; Manufacturing; Microelectronics; Millimeter wave technology; Production; Resists; Semiconductor device manufacture; Semiconductor waveguides; Silver; artwork; diaphragm; eachting; mask;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications, and Computer Science, 2006. TCSET 2006. International Conference
Conference_Location :
Lviv-Slavsko
Print_ISBN :
966-553-507-2
DOI :
10.1109/TCSET.2006.4404683
