• DocumentCode
    468887
  • Title

    CMOS Devices - Physics and Technologies of Mobility Enhancement

  • Author

    Takagi, Shinichi ; Clerc, Raphael

  • Author_Institution
    The University of Tokyo MIRAI-AIST
  • fYear
    2007
  • fDate
    10-12 Dec. 2007
  • Firstpage
    701
  • Lastpage
    701
  • Keywords
    CMOS technology; Capacitance; Capacitive sensors; Electric variables; Fabrication; Germanium silicon alloys; MOSFETs; Paper technology; Physics; Silicon germanium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2007. IEDM 2007. IEEE International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    978-1-4244-1507-6
  • Electronic_ISBN
    978-1-4244-1508-3
  • Type

    conf

  • DOI
    10.1109/IEDM.2007.4419042
  • Filename
    4419042