Alignment of the ATLAS inner detector

The ATLAS Experiment is a general purpose detector that will operate at the Large Hadron Collider at CERN in Geneva, Switzerland. Data taking of ATLAS is expected to start mid 2008. The reconstruction of charged particles is performed by silicon and drift tube based subdetectors. In order to achieve its physics goals, the ATLAS tracking requires that the positions of the silicon detector elements are known to a precision better than 10 micrometers. The ultimate precision can only be achieved by track based alignment algorithms. Such algorithms have been developed and the general proof of principles is shown using limited setups such as a test beam data or tracks from cosmic events. In addition the alignment algorithms are exercised using simulated data produced with a misaligned detector geometry.