Title :
Large area strip edgeless detectors fabricated by plasma etching process
Author :
Pellegrini, G. ; Balbuena, J. ; Eremin, V. ; Garcia, C. ; Lacasta, C. ; Lacuesta, V. ; Lozano, M. ; Martí, S. ; Miñano, M. ; Ruggiero, G. ; Ullán, M.
Author_Institution :
CNM-IMB, Barcelona
fDate :
Oct. 26 2007-Nov. 3 2007
Abstract :
This work presents the last results from large area edgeless detector, fabricated by Plasma Etching Process to reduce the conventional width of the terminating structure of position sensitive detectors to the detector rim.. A current terminating ring is used to decouple the electrical behavior of the surface from the sensitive volume within a few tens of micrometers. The detectors have been illuminated using an infrared laser and their surface scanned in order to understand their collection behavior at the cut edge. The detectors have very high efficiency up to the insensitive area which is located about 60 mum from the detector edge.
Keywords :
position sensitive particle detectors; readout electronics; sputter etching; current terminating ring; detector rim; infrared laser; plasma etching process; position sensitive detectors; read out electronic; strip edgeless detectors; Etching; Image edge detection; Infrared detectors; Laser beam cutting; Nuclear and plasma sciences; Plasma applications; Position sensitive particle detectors; Strips; Surface cleaning; Surface emitting lasers;
Conference_Titel :
Nuclear Science Symposium Conference Record, 2007. NSS '07. IEEE
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-0922-8
Electronic_ISBN :
1095-7863
DOI :
10.1109/NSSMIC.2007.4437274