DocumentCode
472539
Title
Design and analysis of resonant based gas sensor
Author
Uma, G. ; Umapathy, M. ; Vidhya, L. Baby ; Maya, M. ; Sophia, T. ; Tamilarasi, K.
Author_Institution
Nat. Inst. of Technol., Tiruchirappalli
fYear
2008
fDate
12-14 Feb. 2008
Firstpage
119
Lastpage
121
Abstract
This paper presents modeling and simulation of micro cantilever based resonant sensor which uses piezoelectric excitation and detection. Length and width analysis is carried out for maximum displacement at resonance. The proposed design is tested for mass sensitiveness, with conditioning electronics using Coventorware.
Keywords
gas sensors; microsensors; conditioning electronics; gas sensor; mass sensitiveness; micro cantilever; piezoelectric excitation; resonant sensor; Analytical models; Chemical sensors; Computational modeling; Frequency measurement; Gas detectors; Micromechanical devices; Platinum; Resonance; Resonant frequency; Structural beams; Coventorware; Piezoelectric; Resonant sensor;
fLanguage
English
Publisher
iet
Conference_Titel
Sensors Applications Symposium, 2008. SAS 2008. IEEE
Conference_Location
Atlanta, GA
Print_ISBN
978-1-4244-1962-3
Electronic_ISBN
978-1-4244-1963-0
Type
conf
Filename
4472955
Link To Document