• DocumentCode
    472634
  • Title

    1.1K-Gate CMOS/SOI Gate Array by Laser Recrystallization Technique

  • Author

    Sakashita, K. ; Nishimura, T. ; Kusunoki, S. ; Kuramitsu, Y. ; Akasaka, Y.

  • Author_Institution
    LSI Research and Development Laboratory Mitsubishi Electric Corporation 4-1 Mizuhara, Itami, 664 Japan
  • fYear
    1985
  • fDate
    14-16 May 1985
  • Firstpage
    32
  • Lastpage
    33
  • Keywords
    Grain boundaries; Laboratories; Large scale integration; Optical arrays; Optical device fabrication; Power lasers; Research and development; Ring lasers; Silicon; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1985. Digest of Technical Papers. Symposium on
  • Conference_Location
    Kobe, Japan
  • Print_ISBN
    4-930813-09-3
  • Type

    conf

  • Filename
    4480289
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=472634