Title :
An i-Line Wafer Stepper with Variable Coherency and Numerical Aperture
Author :
Horiuchi, Toshiyuki ; Suzuki, Masanori
Author_Institution :
Atsugi Electrical Communication Laboratory, NTT 1839, Ono, Atsugi, Kanagawa 243-01, Japan
Keywords :
Apertures; Controllability; Focusing; Laboratories; Lenses; Light sources; Lighting; Lithography; Resists; Shape control;
Conference_Titel :
VLSI Technology, 1985. Digest of Technical Papers. Symposium on
Conference_Location :
Kobe, Japan
Print_ISBN :
4-930813-09-3
