DocumentCode

472657

Title

An i-Line Wafer Stepper with Variable Coherency and Numerical Aperture

Author

Horiuchi, Toshiyuki ; Suzuki, Masanori

Author_Institution

Atsugi Electrical Communication Laboratory, NTT 1839, Ono, Atsugi, Kanagawa 243-01, Japan

fYear

1985

fDate

14-16 May 1985

Firstpage

80

Lastpage

81

Keywords

Apertures; Controllability; Focusing; Laboratories; Lenses; Light sources; Lighting; Lithography; Resists; Shape control;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1985. Digest of Technical Papers. Symposium on

Conference_Location

Kobe, Japan

Print_ISBN

4-930813-09-3

Type

conf

Filename

4480313