DocumentCode
472690
Title
Channel Length and Source/Drain Series Resistance Extraction for Conventional and LDD MOSFET´s
Author
Chang, Chi ; Hu, Genda ; Hui, Ken
Author_Institution
Sierra Semiconductor Corporation 2075 North Capitol Avenue San Jose, California 95132
fYear
1986
fDate
28-30 May 1986
Firstpage
29
Lastpage
30
Keywords
Data mining; Electric resistance; Electric variables measurement; Electrical resistance measurement; Implants; Length measurement; MOSFETs; Substrates; Testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1986. Digest of Technical Papers. Symposium on
Conference_Location
San Diego, CA, USA
Type
conf
Filename
4480354
Link To Document