DocumentCode
472698
Title
Epitaxial SiC Emitter for High Speed Bipolar VLSIs
Author
Sugii, T. ; Ito, T. ; Furumura, Y. ; Doki, M. ; Mieno, F. ; Maeda, M.
Author_Institution
Fujitsu Laboratories Ltd. Atsugi 243-01, Japan
fYear
1986
fDate
28-30 May 1986
Firstpage
45
Lastpage
46
Keywords
Annealing; Charge carrier processes; Conductivity; Current-voltage characteristics; Diodes; Epitaxial growth; Heterojunctions; Silicon carbide; Temperature; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1986. Digest of Technical Papers. Symposium on
Conference_Location
San Diego, CA, USA
Type
conf
Filename
4480362
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