Characterization of Trench Transistors for 3-D Memories

Author

Banerjee, S.K. ; Shichujo, H. ; Nishimura, A. ; Shah, A.H. ; Pollack, G.P. ; Richardson, W.F. ; Bordelon, M. ; Malhi, S.D.S. ; Elahy, M. ; Womack, R.H. ; Wang, C.P. ; Gallia, J. ; Davis, H.E. ; Chatterjee, P.K.

Author_Institution

Semiconiductor Process and Design Center Texas Instruments Inc. Dallas, Texas 75265

fYear

1986

fDate

28-30 May 1986

Firstpage

Lastpage

Keywords

Capacitors; Doping; Electrical resistance measurement; Epitaxial layers; Etching; MOSFETs; Plugs; Process design; Random access memory; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1986. Digest of Technical Papers. Symposium on

Conference_Location

San Diego, CA, USA

Type

Filename

4480379

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