Title :
The Mechanism of the DESIRE Process
Author :
Roland, B. ; Lombaerts, R. ; Coopmans, F.
Author_Institution :
UCB Electronics N. V., Anderlechtstraat 33, B-1620 Drogenbos Belgium
Keywords :
Aluminum; Coatings; Etching; Optical reflection; Optical refraction; Plasma applications; Resins; Resists; Silicon; Surfaces;
Conference_Titel :
VLSI Technology, 1987. Digest of Technical Papers. Symposium on
Conference_Location :
Karuizawa, Japan
