A 100nm Emitter Transistor Fabricated with Direct EB Writing for High-Speed Bipolar LSIs

Author

Tamaki, Yoichi ; Murai, Fumio ; Sagara, Kazuhiko ; Anzai, Akio

Author_Institution

Central Research Laboratory. Hitachi Ltd. Kokubunji. Tokyo 185. Japan

fYear

1987

fDate

22-23 May 1987

Firstpage

Lastpage

Keywords

Bipolar transistors; Doping; Laboratories; Lithography; Semiconductor films; Shape; Size control; Stress; Surface topography; Writing;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1987. Digest of Technical Papers. Symposium on

Conference_Location

Karuizawa, Japan

Type

Filename

4480407

Link To Document