DocumentCode
472766
Title
Trench Capacitor Using R.T.O. for Mega Bit DRAM´s
Author
Yoneda, K. ; Taniguchi, T. ; Uchida, H. ; Okada, H. ; Oishi, H. ; Miyai, Y. ; Inoue, M.
Author_Institution
Kyoto Reserch Laboratory, Matsushita Electronics Corporation 19, Nishikujo-Kasugacho, Minami-ku, Kyoto 601 Japan
fYear
1987
fDate
22-23 May 1987
Firstpage
95
Lastpage
96
Keywords
Capacitors; Compressive stress; Dielectric breakdown; Electric breakdown; Furnaces; Interface states; Oxidation; Random access memory; Temperature dependence; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1987. Digest of Technical Papers. Symposium on
Conference_Location
Karuizawa, Japan
Type
conf
Filename
4480439
Link To Document