A Folded Resistor and Capacitor (FRC) Static Memory Cell with Triple Poly-Si Structures

Author

Yamanaka, Toshiaki ; Hashimoto, Naotaka ; Kawamoto, Yoshifumi ; Sakai, Yoshio ; Honjo, Shigeru ; Minato, Osamu

Author_Institution

Central Research Laboratory, Hitachi Ltd. Kokubunji, Tokyo 185, Japan

fYear

1987

fDate

22-23 May 1987

Firstpage

101

Lastpage

102

Keywords

Breakdown voltage; CMOS process; Capacitance; Capacitors; Conductivity; Electrodes; Error analysis; Insulation; Power dissipation; Resistors;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1987. Digest of Technical Papers. Symposium on

Conference_Location

Karuizawa, Japan

Type

Filename

4480442

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