DocumentCode
472771
Title
A CMOS A/D Converter on Laser Recrystallized SOI with Controlling the Crystal Growth Direction
Author
Kusunoki, S. ; Sugahara, K. ; Nishimura, T. ; Kumamoto, T. ; Nakaya, M. ; Yazawa, N. ; Horiba, Y.
Author_Institution
LSI R & D Laboratory, Mitsubishi Electric Corporation 4-1 Misuhara, Itami 664 Japan
fYear
1987
fDate
22-23 May 1987
Firstpage
107
Lastpage
108
Keywords
Circuits; Crystallization; Crystallography; Etching; MOSFETs; Optical control; Oxidation; Sampling methods; Shape control; Silicon on insulator technology;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1987. Digest of Technical Papers. Symposium on
Conference_Location
Karuizawa, Japan
Type
conf
Filename
4480445
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