DocumentCode
472796
Title
High Density Memory Cell Structure
Author
Itoh, K. ; Sunami, H.
Author_Institution
Central Research Laboratory, Hitachi Ltd., Tokyo, Japan
fYear
1981
fDate
9-11 Sept. 1981
Firstpage
48
Lastpage
49
Keywords
Capacitors; Circuit noise; DRAM chips; Electron devices; Laboratories; Manufacturing; Noise reduction; Parasitic capacitance; Random access memory; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Type
conf
Filename
4480519
Link To Document