DocumentCode
472798
Title
One Micron LSI MOS Memory Using Direct Electron Beam Lithography
Author
Shah, P. ; Pollack, G. ; Miller, R. ; Varnell, G. ; Love, R. ; Lee, W. ; Wood, S. ; Robbins, R.
Author_Institution
Texas Instruments Incorporated P. O. Box 225012, MS-82, Dallas, Texas 75065
fYear
1981
fDate
9-11 Sept. 1981
Firstpage
52
Lastpage
53
Keywords
Circuits; Electron beams; Implants; Instruments; Large scale integration; Lithography; Optical design; Resists; Vehicles; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Type
conf
Filename
4480521
Link To Document