Title :
Laser-Photochemical Techniques for VLSI Processing
Author :
Silversmith, D.J. ; Ehrlich, D.J. ; Osgood, R.M. ; Deutsch, T.F.
Author_Institution :
Lincoln Laboratory, Massachusetts Institute of Technology Lexington, Massachusetts 02173
Keywords :
Etching; Gas lasers; Heating; Laser beams; Optical pulses; Photochemistry; Pulsed laser deposition; Semiconductor lasers; Surface emitting lasers; Very large scale integration;
Conference_Titel :
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
