DocumentCode
472808
Title
Laser-Photochemical Techniques for VLSI Processing
Author
Silversmith, D.J. ; Ehrlich, D.J. ; Osgood, R.M. ; Deutsch, T.F.
Author_Institution
Lincoln Laboratory, Massachusetts Institute of Technology Lexington, Massachusetts 02173
fYear
1981
fDate
9-11 Sept. 1981
Firstpage
70
Lastpage
71
Keywords
Etching; Gas lasers; Heating; Laser beams; Optical pulses; Photochemistry; Pulsed laser deposition; Semiconductor lasers; Surface emitting lasers; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Type
conf
Filename
4480531
Link To Document