DocumentCode :
472813
Title :
A Versatile Multilevel Metallisation Technology for VLSI Applications
Author :
Perkins, K.D. ; Maleham, J. ; Rhodes, S.J. ; Boys, D.R.
Author_Institution :
Plessey Research (Caswell) Ltd. Allen Clark Research Centre, Caswell, Towcester, Northants, England
fYear :
1981
fDate :
9-11 Sept. 1981
Firstpage :
80
Lastpage :
81
Keywords :
Coatings; Electromigration; Etching; Insulation testing; Integrated circuit interconnections; Metallization; Polyimides; Production; Resists; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
Type :
conf
Filename :
4480536
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=472813
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