DocumentCode
472821
Title
Technology Challenges for CMOS VLSI
Author
CMOS Development Team
Author_Institution
Texas Instruments Inc. Dallas, Texas 75265 USA
fYear
1982
fDate
1-3 Sept. 1982
Firstpage
2
Lastpage
5
Keywords
CMOS process; CMOS technology; Degradation; Instruments; MOS devices; MOSFETs; Production; Read only memory; Transistors; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1982. Digest of Technical Papers. Symposium on
Conference_Location
Oiso, Japan
Type
conf
Filename
4480551
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