DocumentCode
472832
Title
The SWAMI - A Defect Free and Near-Zero Bird´s Beak Local Oxidation Technology for VLSI
Author
Chiu, K.Y. ; Fang, R. ; Lin, J. ; Moll, J.L.
Author_Institution
Hewlett Packard Laboratories 3500 Deer Creek Road, Palo Alto, CA 94304
fYear
1982
fDate
1-3 Sept. 1982
Firstpage
28
Lastpage
29
Keywords
Anisotropic magnetoresistance; Geometry; Isolation technology; Laboratories; Oxidation; Silicon; Stress; Substrates; Very large scale integration; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1982. Digest of Technical Papers. Symposium on
Conference_Location
Oiso, Japan
Type
conf
Filename
4480563
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