• DocumentCode
    472833
  • Title

    Perfect Planar Technology for VLSIs

  • Author

    Ehara, Kohei ; Morimoto, Takashi ; Muraumoto, Susumu ; Hosoya, Tetsuo ; Matsuo, Seitaro

  • Author_Institution
    Musashino Electrical Communication Laboratory, NTT Musashinoshi 3-9-11, Tokyo 180, Japan
  • fYear
    1982
  • fDate
    1-3 Sept. 1982
  • Firstpage
    30
  • Lastpage
    31
  • Keywords
    Cyclotrons; Etching; Fabrication; Large scale integration; Plasma applications; Plasma properties; Resists; Semiconductor devices; Substrates; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1982. Digest of Technical Papers. Symposium on
  • Conference_Location
    Oiso, Japan
  • Type

    conf

  • Filename
    4480564
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=472833