DocumentCode

472839

Title

A Comparison of HCMOS-III and HMOS-III Technologies for 64K or Larger Static RAMS

Author

Barnes, John J.

Author_Institution

Motorola, MOS IC Division 3501 Ed Bluestein Blvd, Austin, Texas 78721

fYear

1982

fDate

1-3 Sept. 1982

Firstpage

44

Lastpage

45

Keywords

Circuits; Degradation; Dielectrics; Etching; Implants; Lithography; P-n junctions; Passivation; Resists; Threshold voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1982. Digest of Technical Papers. Symposium on

Conference_Location

Oiso, Japan

Type

conf

Filename

4480570