Title :
Characterization and Optimization of a Laser Fusing Technology for VLSI Memories
Author :
Shiozaki, M. ; Hashimoto, K. ; Morita, S. ; Hishioka, K. ; Nishimura, H.
Author_Institution :
Toshiba Corp. Kawasaki, Japan
Keywords :
CMOS technology; Explosions; Fuses; Internal stresses; Laser beams; Laser theory; Optimized production technology; Passivation; Silicon compounds; Very large scale integration;
Conference_Titel :
VLSI Technology, 1982. Digest of Technical Papers. Symposium on
Conference_Location :
Oiso, Japan
