Title :
An Imaging Device as a VLSI
Author :
Terui, Y. ; Yoshino, M. ; Nakayama, M. ; Kugimiya, K. ; Akiyama, S.
Author_Institution :
Semiconductor Research Laboratory Matsushita Electric Industrial Company, Ltd. Moriguchi, Osaka 570, Japan
Keywords :
Annealing; Dark current; Electrons; Intrusion detection; Laboratories; Noise figure; Semiconductor device noise; Stacking; Temperature; Very large scale integration;
Conference_Titel :
VLSI Technology, 1982. Digest of Technical Papers. Symposium on
Conference_Location :
Oiso, Japan
