DocumentCode

472857

Title

The Selective Annealing Technique : An-Overview

Author

Inge, J. Col ; Demoulin, E. ; Bensahel, D. ; Auvert, C.

Author_Institution

C.N.E.T. - C.N.S. B.P. 42, 38240 Meylan, France

fYear

1982

fDate

1-3 Sept. 1982

Firstpage

84

Lastpage

85

Keywords

Annealing; Coatings; Crystals; Dielectric substrates; Grain boundaries; Optical coupling; Power lasers; Shape control; Silicon; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1982. Digest of Technical Papers. Symposium on

Conference_Location

Oiso, Japan

Type

conf

Filename

4480588