Title :
New UV Resists with Negative or Positive Tone
Author :
Ito, Hiroshi ; Willson, C. Grant ; Frechet, Jean H.J.
Author_Institution :
IBM Research Laboratory San Jose, California 95193, U.S.A.
Keywords :
Character generation; Couplings; Degradation; Indium tin oxide; Inhibitors; Laboratories; Petroleum; Photochemistry; Polymer films; Resists;
Conference_Titel :
VLSI Technology, 1982. Digest of Technical Papers. Symposium on
Conference_Location :
Oiso, Japan
