DocumentCode
472878
Title
Super Self-Aligned Bipolar Technology
Author
Sakai, T. ; Suzuki, M.
Author_Institution
Atsugi Electrical Communication Laboratory, NTT 1839, Ono, Atsugi-shi, Kanagawa, Japan
fYear
1983
fDate
13-15 Sept. 1983
Firstpage
16
Lastpage
19
Keywords
Electrodes; Fabrication; Frequency conversion; Integrated circuit technology; Large scale integration; Logic; Optical buffering; Propagation delay; Read-write memory; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Print_ISBN
4-930813-05-0
Type
conf
Filename
4480617
Link To Document