• DocumentCode
    472881
  • Title

    New U-Groove Isolation Technology for High-Speed Bipolar Memory

  • Author

    Tamaki, Y. ; Shiba, T. ; Honma, N. ; Mizuo, S. ; Hayasaka, A.

  • Author_Institution
    Central Research Laboratory, Hitachi Ltd. Kokubunji, Tokyo 185, Japan
  • fYear
    1983
  • fDate
    13-15 Sept. 1983
  • Firstpage
    24
  • Lastpage
    25
  • Keywords
    Capacitance; Circuit testing; Computer simulation; Delay effects; Diodes; Isolation technology; Laboratories; Lithography; Low voltage; Random access memory;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1983. Digest of Technical Papers. Symposium on
  • Conference_Location
    Maui, HI, USA
  • Print_ISBN
    4-930813-05-0
  • Type

    conf

  • Filename
    4480620
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=472881