DocumentCode :
472897
Title :
A High Performance 16 Bit CPU Using Platinum-Silicide Gate
Author :
Okazawa, Takeshi ; Goto, Hideto ; Takemae, Koji
Author_Institution :
NEC Corporation Sagamihara, Kanagawa 229, Japan
fYear :
1983
fDate :
13-15 Sept. 1983
Firstpage :
62
Lastpage :
63
Keywords :
Annealing; Electric resistance; Electrodes; Integrated circuit interconnections; Large scale integration; Leakage current; Silicidation; Silicides; Silicon; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
Print_ISBN :
4-930813-05-0
Type :
conf
Filename :
4480637
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=472897
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