DocumentCode
472897
Title
A High Performance 16 Bit CPU Using Platinum-Silicide Gate
Author
Okazawa, Takeshi ; Goto, Hideto ; Takemae, Koji
Author_Institution
NEC Corporation Sagamihara, Kanagawa 229, Japan
fYear
1983
fDate
13-15 Sept. 1983
Firstpage
62
Lastpage
63
Keywords
Annealing; Electric resistance; Electrodes; Integrated circuit interconnections; Large scale integration; Leakage current; Silicidation; Silicides; Silicon; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Print_ISBN
4-930813-05-0
Type
conf
Filename
4480637
Link To Document