DocumentCode
472898
Title
Computer Aided Research Automation System for Advanced VLSI
Author
Funakoshi, Kiyohiko ; Izawa, Ryuichi ; Isaka, Mitsuaki ; Matsuda, Masatoshi ; Hirosawa, Toshio ; Hashimoto, Norikazu ; Asai, Shojiro
Author_Institution
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo, Japan
fYear
1983
fDate
13-15 Sept. 1983
Firstpage
64
Lastpage
65
Keywords
Automatic control; Automation; Control systems; Data analysis; Furnaces; Laboratories; Process control; Semiconductor device measurement; Thickness measurement; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Print_ISBN
4-930813-05-0
Type
conf
Filename
4480638
Link To Document