DocumentCode :
472899
Title :
A New Algorithm for Reticle Inspection
Author :
Yoshikawa, Ryoichi ; Sasaki, Sadao
Author_Institution :
IC Laboratory, Toshiba R and D Center Kawasaki, Japan
fYear :
1983
fDate :
13-15 Sept. 1983
Firstpage :
66
Lastpage :
67
Keywords :
Distribution functions; Inspection; Laboratories; Optical sensors; Optical signal processing; Photodiodes; Research and development; Sensor phenomena and characterization; Signal processing algorithms; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location :
Maui, HI, USA
Print_ISBN :
4-930813-05-0
Type :
conf
Filename :
4480639
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=472899
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