• DocumentCode
    472902
  • Title

    SUPREM III - Process Simulation Toward VLSI

  • Author

    Ho, C.P. ; Plummer, J.D. ; Hansen, S.E. ; Dutton, R.W.

  • Author_Institution
    Integrated Circuits Lab, Stanford University Stanford, CA 94305
  • fYear
    1983
  • fDate
    13-15 Sept. 1983
  • Firstpage
    72
  • Lastpage
    73
  • Keywords
    Circuit simulation; Computational modeling; Epitaxial growth; Ion implantation; Oxidation; Predictive models; Semiconductor process modeling; Silicon; Substrates; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1983. Digest of Technical Papers. Symposium on
  • Conference_Location
    Maui, HI, USA
  • Print_ISBN
    4-930813-05-0
  • Type

    conf

  • Filename
    4480642
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=472902