DocumentCode
472919
Title
SEPOX Compatible High Density Floating Gate EPROM Structure
Author
Matsukawa, N. ; Niitsu, Y. ; Matsunaga, J. ; Nozawa, H. ; Kohyama, S.
Author_Institution
Semiconductor Device Engineering Laboratory Toshiba Corporation, Kawasaki, Japan
fYear
1983
fDate
13-15 Sept. 1983
Firstpage
108
Lastpage
109
Keywords
Capacitance; EPROM; Large scale integration; Logic devices; Microprocessors; Nonvolatile memory; Oxidation; Testing; Threshold voltage; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1983. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Print_ISBN
4-930813-05-0
Type
conf
Filename
4480660
Link To Document