DocumentCode

472930

Title

High Capacitance Trench Structure (HI-CAT) for Megabit LSI

Author

Satoh, S. ; Yoneda, M. ; Nagatomo, M. ; Fujishima, K. ; Yamazaki, T. ; Nakata, H.

Author_Institution

LSI R & D Laboratory, Mitsubishi Electric Corp. Itami, Hyogo 664, Japan

fYear

1984

fDate

10-12 Sept. 1984

Firstpage

18

Lastpage

19

Keywords

Aluminum; Capacitance; Dielectric breakdown; Electrodes; Error analysis; Etching; Laboratories; Large scale integration; MOS capacitors; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1984. Digest of Technical Papers. Symposium on

Conference_Location

San Diego, CA, USA

Print_ISBN

4-930813-08-5

Type

conf

Filename

4480679