DocumentCode

472938

Title

Multilevel Interconnection for VLSI

fYear

1984

fDate

10-12 Sept. 1984

Firstpage

36

Lastpage

36

Keywords

Dielectrics; Fabrication; Planarization; Reflection; Routing; Semiconductor device doping; Very large scale integration; Wiring;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1984. Digest of Technical Papers. Symposium on

Conference_Location

San Diego, CA, USA

Print_ISBN

4-930813-08-5

Type

conf

Filename

4480687