DocumentCode :
472938
Title :
Multilevel Interconnection for VLSI
fYear :
1984
fDate :
10-12 Sept. 1984
Firstpage :
36
Lastpage :
36
Keywords :
Dielectrics; Fabrication; Planarization; Reflection; Routing; Semiconductor device doping; Very large scale integration; Wiring;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
4-930813-08-5
Type :
conf
Filename :
4480687
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=472938
