DocumentCode

472940

Title

Poly-Oxide/Nitride/Oxide Structures for Highly Reliable EPROM Cells

Author

Mori, S. ; Sato, M. ; Mikata, Y. ; Yoshikawa, K. ; Yanase, T.

Author_Institution

Semiconductor Device Engineering Laboratory Toshiba Corporation, Kawasaki, Japan

fYear

1984

fDate

10-12 Sept. 1984

Firstpage

40

Lastpage

41

Keywords

Capacitors; Conductive films; EPROM; Electrons; Insulation; Leakage current; Oxidation; Stress; Thermal conductivity; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1984. Digest of Technical Papers. Symposium on

Conference_Location

San Diego, CA, USA

Print_ISBN

4-930813-08-5

Type

conf

Filename

4480689